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NXP claims piezoresistive silicon MEMS at 1.1 GHz
NXP claims piezoresistive silicon MEMS at 1.1 GHz
At IEDM, NXP res 5b4 earchers reported on what they claimed to be a demonstrable scalable piezoresistive MEMS resonator built in silicon and operating at a record 1.1 GHz.
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2007-12-12 20:55:00
 
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