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IMEC details high - k planar CMOS advances

IMEC details high - k planar CMOS advances
Researchers from Belgian 5b4 research group IMEC and its partners in the 32-nm CMOS program claim to have made significant advances in improving the performance of planar CMOS using hafnium-based high-k dielectrics and tantalum-carbide metal gates.
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2007-12-11 11:26:00
 
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