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DRAM MIMCAP process is next focus for IMEC 32 - nm project

DRAM MIMCAP process is next focus for IMEC 32 - nm project
Belgian r 5b4 esearch organization IMEC has extended its work on 32-nm CMOS device scaling to include a project on DRAM MIMCAP (metal-insulator-metal capacitors) process technology.
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2007-10-16 09:44:00
 
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