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Thermochemical process yields nanoscale lithography
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Thermochemical process yields nanoscale lithography |
Researchers at the Georgia Institute of Technology have developed what they claim is a fast, reliable, environmentally flexible, commercially viable way of creating nanoscale structures. The technique, TCNL (thermochemical nanolithography), employs the heated tip of an atomic-force microscope to induce a chemical reaction on the surface of a thin polymer film.
Details
2007-10-03 19:47:00
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