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ASML claims record productivity with i-Line scanner

ASML claims record productivity with i-Line scanner
Semiconductor production equipment maker ASML Holding NV claims one of its leading Taiwanese customers has processed 150 wafers per hour for 24 hours using its Twinscan i-Line scanners , reaching a record output of 3,596 wafers in a single day.
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2007-09-12 14:47:00
 
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